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Application of gas-phase FTIR and microwave spectroscopy for characterization and determination of impurities in SiF4

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Sennikov, P. , Chuprov, L. A. , Ignatov, S. , Vaks, V. L. , Tokhadze, K. G. and Schrems, O. (2006): Application of gas-phase FTIR and microwave spectroscopy for characterization and determination of impurities in SiF4 , The 25th Conference on Precision Electromagnetic Measurements (CPEM-2006), 9-14 July, Turin, Italy. .
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