Application of gas-phase FTIR and microwave spectroscopy for characterization and determination of impurities in SiF4


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oschrems [ at ] awi-bremerhaven.de

Abstract


Item Type
Conference (Poster)
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Not peer-reviewed
Publication Status
Published
Event Details
The 25th Conference on Precision Electromagnetic Measurements (CPEM-2006), 9-14 July, Turin, Italy..
Eprint ID
15504
Cite as
Sennikov, P. , Chuprov, L. A. , Ignatov, S. , Vaks, V. L. , Tokhadze, K. G. and Schrems, O. (2006): Application of gas-phase FTIR and microwave spectroscopy for characterization and determination of impurities in SiF4 , The 25th Conference on Precision Electromagnetic Measurements (CPEM-2006), 9-14 July, Turin, Italy. .


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