High-resolution Fourier-transform IR spectroscopic determination of impurities in silicon tetrafluoride and silane prepared from it


Contact
oschrems [ at ] awi-bremerhaven.de

Abstract

The impurity compositions of silicon tetrafluoride and silane prepared from it have been determined by high-resolution Fourier-transform IR spectroscopy. In the spectra of SiF4 samples differing in purity, we have identified rovibrational bands arising from Si2F6O, SiF3OH, HF, SiF3H, SiF2H2, SiH3F, CH4, CO2, and CO impurities. Their detection limits lie in the range 9 x 10(-5) (CO2) to 3 x 10(-3) mol % (Si2F6O). In the spectra of SiH4 samples of different purity, we have detected CH4, CO2, SiF3H, SiF2H2, and SiF4 impurities. Their detection limits lie in the range 8 x 10(-5) (CO2) to 1 x 10(-3) mol % (SiF4).



Item Type
Article
Authors
Divisions
Programs
Peer revision
ISI/Scopus peer-reviewed
Publication Status
Published
Eprint ID
15686
Cite as
Chuprov, L. A. , Sennikov, P. , Tokhadze, K. G. , Ignatov, S. and Schrems, O. (2006): High-resolution Fourier-transform IR spectroscopic determination of impurities in silicon tetrafluoride and silane prepared from it , Inorganic materials, 42 (8), pp. 924-931 .


Download
[img] PDF (Fulltext)
Chu2006a.pdf

Download (233kB)
Cite this document as:

Share

Research Platforms
N/A

Campaigns


Actions
Edit Item Edit Item